{"id":4783,"date":"2025-10-20T11:47:24","date_gmt":"2025-10-20T02:47:24","guid":{"rendered":"https:\/\/jteccorp.wdkb.jp\/?page_id=4783"},"modified":"2026-05-29T15:44:41","modified_gmt":"2026-05-29T06:44:41","slug":"pap","status":"publish","type":"page","link":"https:\/\/www.j-tec.co.jp\/english\/device\/pap\/","title":{"rendered":"PAP(Plasma Assisted Polishing )"},"content":{"rendered":"\n<section class=\"pcvm-mv\">\n    <div class=\"pcvm-mv__bg\"><img src=\"\/assets\/img\/pap\/mv.webp\" alt=\"\"><\/div>\n    <div class=\"pcvm-mv__content\">\n        <div class=\"pcvm-mv__image\"><img src=\"\/assets\/img\/pap\/mv-item.webp\" alt=\"\"><\/div>\n        <div class=\"pcvm-mv__text pap\">\n            <h1 class=\"pcvm-mv__title pap\"> <span class=\"pcvm-mv__title-sub pap\"> <span class=\"large\">PAP<span class=\"rmark\"><\/span>\n                    <\/span> <\/span><span class=\"pcvm-mv__title-main pap\">Plasma Assisted Polishing<\/span><\/h1>\n            <div class=\"pcvm-mv__description pap\">\n                <p>Using plasma to activate the workpiece and seal surfaces, it enables clean, efficient polishing without slurry or mechanical processing, and produces no damaged layer.<\/p>\n            <\/div>\n            <div class=\"pcvm-mv__info\">\n                <div class=\"pcvm-mv__info-item left\">\n                    <h3 class=\"pcvm-mv__info-title\">Workpiece<\/h3>\n                    <p class=\"pcvm-mv__info-text\">Diamond,<br class=\"pc\"> Oxide Ceramics<\/p>\n                <\/div>\n                <div class=\"pcvm-mv__info-divider\">&nbsp;<\/div>\n                <div class=\"pcvm-mv__info-item right\">\n                    <h3 class=\"pcvm-mv__info-title\">Application Examples<\/h3>\n                    <ul class=\"pcvm-mv__info-text\">\n                        <li>\u30fbigh-speed polishing of diamond (polycrystalline\u30fbmonocrystalline)<\/li>\n                        <li>\u30fbCreation of damage-free surface without altering the crystal structure, etc.<\/li>\n                    <\/ul>\n                <\/div>\n            <\/div>\n        <\/div>\n    <\/div>\n  <\/section>\n  <div class=\"l-detail-content\">\n    <a id=\"knowledge\" class=\"u-scroll-point\"><\/a>\n    <section class=\"c-section pcvm-intro\">\n        <div class=\"pcvm-intro__content\">\n            <div class=\"pcvm-intro__text\">\n                <h2 class=\"c-title l2 \"> PAP Technology <br>Developed by JTEC CORPORATION <\/h2>\n                <h3 class=\"pcvm-intro__subtitle\"> PAP (Plasma Assisted Polishing) <\/h3>\n                <p class=\"text\"> PAP utilizes plasma to activate and polish surfaces, specifically designed for polishing hard materials such as diamond. Compared to conventional mechanical polishing using diamond abrasives, it offers higher efficiency while preventing the formation of processing-induced damage layers. This technology is gaining significant attention for its potential in the polishing process of diamond substrates, which are expected to play a crucial role in next-generation power devices. <\/p>\n            <\/div>\n            <div class=\"pcvm-intro__image\"><iframe src=\"https:\/\/www.youtube.com\/embed\/QOK0qi4XRPc?feature=oembed\" frameborder=\"0\" allowfullscreen><\/iframe>\n  \n                <figcaption class=\"u-mt10\">High-efficiency polishing with plasma assistance without damaging the substrate<\/figcaption>\n            <\/div>\n        <\/div>\n    <\/section>\n    <!-- Strengths Section -->\n    <section class=\"c-section pcvm-strength\">\n        <h2 class=\"c-title pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">Strengths of PAP Technology<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <div class=\"pcvm-strength__grid\">\n            <div class=\"pcvm-strength__item\">\n                <p class=\"pcvm-strength__label\">POINT<\/p>\n                <div class=\"pcvm-strength__icon\">\n                    <img src=\"\/assets\/img\/pap\/icon_point01.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-strength__title\">High-efficiency, high-precision polishing<\/h3>\n                <p class=\"pcvm-strength__text\">Achieves both high processing speed and precision at an advanced level<\/p>\n            <\/div>\n            <div class=\"pcvm-strength__item\">\n                <p class=\"pcvm-strength__label\">POINT<\/p>\n                <div class=\"pcvm-strength__icon\">\n                    <img src=\"\/assets\/img\/pap\/icon_point02.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-strength__title\">No processing-induced alteration layer<\/h3>\n                <p class=\"pcvm-strength__text\">Preserves crystal structure integrity and prevents surface damage, enhancing product reliability and performance<\/p>\n            <\/div>\n            <div class=\"pcvm-strength__item\">\n                <p class=\"pcvm-strength__label\">POINT<\/p>\n                <div class=\"pcvm-strength__icon\">\n                    <img src=\"\/assets\/img\/pap\/icon_point03.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-strength__title\">Environmentally conscious<\/h3>\n                <p class=\"pcvm-strength__text\">A fully dry process that does not use chemicals or polishing slurry, contributing to reduced environmental impact.<\/p>\n            <\/div>\n        <\/div>\n    <\/section>\n    <!-- Advantages Section -->\n    <section class=\"c-section pcvm-superiority\">\n        <h2 class=\"pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">Advantages<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <p class=\"pcvm-superiority__desc\">The PAP (Plasma Assisted Polishing) is designed to achieve high-efficiency and damage-free polishing by utilizing plasma-activated particles (ions and radicals) that chemically bond with the atoms on the surface of the workpiece, weakening the interatomic bonds. This enables high-precision processing of ultra-hard materials such as diamond, which has been challenging with conventional mechanical polishing methods.<\/p>\n        <div class=\"pcvm-superiority__grid\">\n            <div class=\"pcvm-superiority__card\">\n                <div class=\"pcvm-superiority__icon\">\n                    <img src=\"\/assets\/img\/pap\/icon_loop.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-superiority__title\">Wide Applicability<\/h3>\n                <p class=\"pcvm-superiority__text\">Applicable to hard materials and new materials beyond diamond, providing system for a wide range of phases from research and development to mass production.<\/p>\n            <\/div>\n            <div class=\"pcvm-superiority__card\">\n                <div class=\"pcvm-superiority__icon\">\n                    <img src=\"\/assets\/img\/pap\/icon_time.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-superiority__title\">Shortened Polishing Time<\/h3>\n                <p class=\"pcvm-superiority__text\">Reduced Polishing Time for Improved Efficiency<\/p>\n            <\/div>\n            <div class=\"pcvm-superiority__card\">\n                <div class=\"pcvm-superiority__icon calculator\">\n                    <img src=\"\/assets\/img\/pap\/icon_calculator-1.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-superiority__title\">Cost Reduction<\/h3>\n                <p class=\"pcvm-superiority__text\">By adopting a simple design, system costs are reduced, and slurry-free operation lowers running costs.<\/p>\n            <\/div>\n        <\/div>\n    <\/section>\n    <!-- Application Examples Section -->\n    <section class=\"c-section pcvm-cmp pap\">\n        <div class=\"pcvm-cmp__bg\">\n            <img src=\"\/assets\/img\/pap\/bluelight_dark.webp\" alt=\"\">\n        <\/div>\n        <div class=\"pcvm-cmp__content\">\n            <h2 class=\"pcvm-section-title -white\">\n                <span class=\"pcvm-section-title__text\">Application Examples<\/span>\n                <span class=\"pcvm-section-title__line -white\"><\/span>\n            <\/h2>\n            <p class=\"pcvm-cmp__desc pap\">Devices made from hard materials such as diamond and silicon carbide (SiC) exhibit excellent thermal efficiency due to their high thermal conductivity and low thermal expansion coefficient, allowing them to operate at high temperatures without losing efficiency. As a result, heat dissipation design becomes simpler, and durability and reliability at high temperatures are enhanced. This technology is expected to be increasingly utilized in various fields, including semiconductors, electronics, aerospace, medical devices, renewable energy, laser technology, and transportation sectors such as automobiles and trains.<\/p>\n            <div class=\"pcvm-cmp__flow\">\n                <div class=\"pcvm-cmp__flow-item\">\n                    <div class=\"pcvm-cmp__flow-header\">Application to Hard-to-Process Wafers (e.g., Diamond)<\/div>\n                    <p class=\"pcvm-cmp__flow-text no-flex\"><a class=\"power-device u-link\" href=\"#power-device\">Application to Power Devices<\/a>: Contributing to the performance enhancement of next-generation power devices by applying to high-quality SiC wafers and diamond substrates.<br>Application to Optical Components: Suitable for manufacturing high-precision diamond lenses and windows.<\/p>\n                <\/div>\n                <div class=\"pcvm-cmp__flow-plus\">+<\/div>\n                <div class=\"pcvm-cmp__flow-item\">\n                    <div class=\"pcvm-cmp__flow-header\">Application to Diamond Heat Dissipation Substrates<\/div>\n                    <p class=\"pcvm-cmp__flow-text no-flex\"><a class=\"heat-sink u-link\" href=\"#heat-sink\">Application to Heat Sinks<\/a>: Diamond substrate heat sinks are attracting attention as highly effective cooling solutions due to their excellent thermal conductivity and high durability.<\/p>\n                <\/div>\n                <div class=\"pcvm-cmp__flow-plus\">+<\/div>\n                <div class=\"pcvm-cmp__flow-item\">\n                    <div class=\"pcvm-cmp__flow-header\">Application to Mechanical Uses of Diamond<\/div>\n                    <p class=\"pcvm-cmp__flow-text no03\">Application to Mechanical Uses: Diamond, with its excellent wear resistance and anti-adhesion properties, is gaining attention for use in tools, molds, and sliding components. Additionally, improved machining precision and defect reduction are expected to lower costs and extend product lifespan.<\/p>\n                <\/div>\n            <\/div>\n            <a href=\"\/english\/contact\/pap-contact\/\" class=\"pcvm-contact-button\">\n                <span>Contact Us<\/span>\n            <\/a>\n        <\/div>\n    <\/section>\n    <!-- Technology Application Examples Section -->\n    <section class=\"c-section pcvm-environment\">\n        <h2 class=\"pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">Technology Application Examples<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <!-- Power Devices -->\n        <div class=\"pcvm-product-features__item pap\">\n            <div class=\"c-text\">\n              <a href=\"\" id=\"power-device\"><\/a>\n                <h3 class=\"c-title l2\">Power Devices<\/h3>\n                <p>Diamond substrates contribute to improving the efficiency and reliability of power devices due to their high thermal conductivity and pressure resistance. Additionally, the exceptional properties of diamond enable stable performance even in harsh operating environments. Despite their advantages, diamond substrates face challenges for practical application, including cost, machining difficulty, bonding technology, and thermal expansion issues. However, in terms of machining difficulty, PAP (Plasma Assisted Polishing) has achieved clean, high-efficiency polishing without generating a processing-induced altered layer.<\/p>\n                <h4 class=\"c-title l3 u-mt20\">Application<\/h4>\n                <ul class=\"pcvm-product-features__list u-mt20 u-mb40\">\n                    <li>Power MOSFET (Metal-Oxide-Semiconductor Field-Effect Transistor), IGBT (Insulated Gate Bipolar Transistor)<\/li>\n                    <li>Power conversion devices for solar power generation systems and wind power generation systems<\/li>\n                    <li>Inverters and power control units for Electric Vehicles (EV) and Hybrid Electric Vehicles (HEV)<\/li>\n                    <li>Such as radar systems and satellites for high-frequency and high-power communication systems<\/li>\n                    <li>High-power laser systems and laser-guided systems<\/li>\n                <\/ul>\n            <\/div>\n            <div class=\"c-text\">\n              <a href=\"\" id=\"heat-sink\"><\/a>\n                <h3 class=\"c-title l2\">Heat Sink<\/h3>\n                <p class=\"text\">Heat sinks made of aluminum or copper substrates have been commonly used. However, in electronic devices with high thermal loads, as well as in specialized applications, cooling systems tend to become complex and large-scale. On the other hand, using diamond heat sinks provides a simple and efficient solution. Despite its superior properties, the use of diamond has been limited due to its high cost and machining difficulties. However, PAP (Plasma Assisted Polishing) has enabled clean, high-efficiency polishing without inducing processing-induced damage layers. This technology expands the potential for the practical application of diamond substrate heat sinks.<\/p>\n                <h4 class=\"c-title l3 u-mt20\">Application<\/h4>\n                <ul class=\"pcvm-product-features__list u-mt20 \">\n                    <li>High-Performance Electronic Devices: High-performance semiconductor devices and integrated circuits (ICs)<\/li>\n                    <li>Laser Equipment: High-power laser systems and laser diodes<\/li>\n                    <li>High-Power Electrical Equipment: Power electronics (such as high-power transistors and power MOSFETs)<\/li>\n                    <li>Aerospace and satellite technology<\/li>\n                    <li>Medical systems: Medical devices requiring precise cooling (such as MRI and CT scanners)<\/li>\n                <\/ul>\n            <\/div>\n        <\/div>\n    <\/section>\n    <!-- Processing Overview Section -->\n    <section class=\"c-section pcvm-features\">\n        <h2 class=\"pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">Processing Overview<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <div class=\"pcvm-features__image\">\n            <img src=\"https:\/\/www.j-tec.co.jp\/english\/wp-content\/uploads\/sites\/3\/2026\/02\/pap_gaiyou_en.svg\" alt=\"PAP Processing Overview\">\n        <\/div>\n        <div class=\"pcvm-features__grid col2\">\n            <div class=\"pcvm-features__card\">\n                <h3 class=\"pcvm-features__title\">Plasma-Induced Surface Modification<\/h3>\n                <p class=\"pcvm-features__text\">The reason why even hard materials can be processed is that the plasma on the processing table chemically bonds strongly with the atoms on the surface of the workpiece (such as a diamond substrate), thereby breaking the bonds between the surface and the internal structure of the workpiece.<\/p>\n            <\/div>\n            <div class=\"pcvm-features__card\">\n                <h3 class=\"pcvm-features__title\">Polishing Process<\/h3>\n                <p class=\"pcvm-features__text\">Since this is a dry process that does not use diamond slurry or polishing plates typically used for hard materials, it creates a smooth surface without defects or processing-induced damage.<\/p>\n            <\/div>\n        <\/div>\n    <\/section>\n    <!-- Surface Roughness Improvement Section -->\n    <section class=\"c-section pcvm-case-study daiya\">\n      <h2 class=\"pcvm-section-title\">\n        <span class=\"pcvm-section-title__text\">Surface Roughness Improvement by PAP Processing<br><span class=\"pcvm-section-title__text-sub\">(Workpiece: 3 mm \u00d7 3 mm Single Crystal Diamond)<\/span><\/span>\n        <span class=\"pcvm-section-title__line\"><\/span>\n      <\/h2>\n        <div class=\"u-text-center c-image -white u-mb20\">\n            <img style=\"width: 800px\" src=\"\/assets\/img\/pap\/Processingexample-en.webp\" alt=\"\">\n        <\/div>\n        <div class=\"c-text\">\n            <p class=\"\">By applying PAP (Plasma Assisted Polishing), the surface roughness (Sa value) of diamond substrates is greatly improved from <mark>10.7 nm to 0.23 nm<\/mark>.<\/p>\n        <\/div>\n        <div class=\"c-col2 -half u-mt40\">\n            <div class=\"c-col2__item\">\n                <h3 class=\"c-title l2\">Measurement by Atomic Force Microscopy (AFM)<\/h3>\n                <div class=\"c-image u-text-center -white\"><img src=\"\/assets\/img\/pap\/AFM.webp\" alt=\"\"><\/div>\n                <div class=\"c-text u-mt20\">\n                    <p>Surface roughness after processing: <mark>0.15 nm RMS.<\/mark><\/p>\n                <\/div>\n            <\/div>\n            <div class=\"c-col2__item\">\n                <h3 class=\"c-title l2\">Measurement by Confocal Raman Microscopy<\/h3>\n                <div class=\"c-image u-text-center u-mt20 u-mb20 -white\"><img src=\"\/assets\/img\/pap\/pap_graph_en.webp\" alt=\"\"><\/div>\n                <div class=\"c-text u-mt20\">\n                    <p>Confirmed no disruption in crystallinity or transition to a graphite structure, achieving damage-free polishing.<\/p>\n                <\/div>\n            <\/div>\n        <\/div>\n    <\/section>\n    <!-- Comparison with Conventional Polishing Methods Section -->\n    <section class=\"c-section pcvm-specs\">\n        <h2 class=\"pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">Comparison with Conventional Polishing Methods and Their Advantages<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <div class=\"pcvm-specs__table-wrapper c-table\">\n            <table class=\"pcvm-specs__comparison-table\">\n                <thead>\n                    <tr>\n                        <th class=\"pcvm-specs__comparison-header-method\"><\/th>\n                        <th class=\"pcvm-specs__comparison-header-issues -w30\">Issues<\/th>\n                        <th class=\"pcvm-specs__comparison-header-advantages -w30\">Advantages of PAP (Plasma Assisted Polishing)<\/th>\n                    <\/tr>\n                <\/thead>\n                <tbody>\n                    <tr>\n                        <td class=\"pcvm-specs__comparison-method\">\n                            <strong>Comparison with Mechanical Polishing Methods<\/strong>The mechanical polishing method is a polishing method that physically removes material using hard abrasives such as diamond grit.\n                        <\/td>\n                        <td class=\"pcvm-specs__comparison-issues\">\n                            <div class=\"flex\">\n                                <span>\n                                    <strong>[Low Polishing Efficiency]<\/strong>Polishing hard materials takes time, resulting in low productivity.<\/span>\n                                <span>\n                                    <strong>[Surface Damage Occurrence]<\/strong>During polishing, small surface damages and defects are likely to occur.<\/span>\n                            <\/div>\n                        <\/td>\n                        <td class=\"pcvm-specs__comparison-advantages\">\n                            <div class=\"flex\">\n                                <span>\n                                    <strong>[High-Efficiency Polishing]<\/strong>By applying surface modification through plasma, high-speed polishing of hard materials is possible.<\/span>\n                                <span>\n                                    <strong>[Damage-Free Polishing]<\/strong>Minimizes surface damage, improving the quality of the product.<\/span>\n                            <\/div>\n                        <\/td>\n                    <\/tr>\n                    <tr>\n                        <td class=\"pcvm-specs__comparison-method\">\n                            <strong>Comparison with Chemical Mechanical Polishing (CMP) Method<br><\/strong>CMP is a method that combines chemical etching and mechanical polishing, mainly used for planarizing semiconductor wafers.\n                        <\/td>\n                        <td class=\"pcvm-specs__comparison-issues\">\n                            <div class=\"flex\">\n                                <span>\n                                    <strong>[Environmental Impact]<\/strong>Since a large amount of chemicals is used, concerns arise regarding wastewater treatment and environmental impact.<\/span>\n                                <span>\n                                    <strong>[Difficulty in Application to Hard Materials]<\/strong>The effectiveness is limited for ultra-hard materials such as diamond.<\/span>\n                            <\/div>\n                        <\/td>\n                        <td class=\"pcvm-specs__comparison-advantages\">\n                            <div class=\"flex\">\n                                <span>\n                                    <strong>[Environmentally Friendly]<\/strong>Only plasma is used, with no chemical usage at all.<\/span>\n                                <span>\n                                    <strong>[Specialized for Hard Materials]<\/strong>High-precision polishing is possible for materials such as diamond, which are difficult to process with CMP.<\/span>\n                            <\/div>\n                        <\/td>\n                    <\/tr>\n                    <tr>\n                        <td class=\"pcvm-specs__comparison-method\">\n                            <strong>Comparison with Ion Beam Polishing Method<br><\/strong>The ion beam polishing method is a polishing method that removes material by irradiating the material surface with an ion beam.\n                        <\/td>\n                        <td class=\"pcvm-specs__comparison-issues\">\n                            <div class=\"flex\">\n                                <span>\n                                    <strong>[High system Cost]<\/strong>Advanced vacuum system and ion sources are required, leading to high initial investment.<\/span>\n                                <span>\n                                    <strong>[Slow Polishing Speed]<\/strong>The removal rate is low, making it unsuitable for large-area polishing or mass production.<\/span>\n                            <\/div>\n                        <\/td>\n                        <td class=\"pcvm-specs__comparison-advantages\">\n                            <div class=\"flex\">\n                                <span>\n                                    <strong>[Cost-Effective system]<\/strong>PAP is more cost-effective compared to ion beam system.<\/span>\n                                <span>\n                                    <strong>[High Polishing Speed]<\/strong>By combining plasma and mechanical polishing, efficient polishing is possible.<\/span>\n                            <\/div>\n                        <\/td>\n                    <\/tr>\n                    <tr>\n                        <td class=\"pcvm-specs__comparison-method\">\n                            <strong>Comparison with Laser Processing Method<br><\/strong>The laser processing method is a processing method that uses a high-power laser to evaporate or sublimate materials.\n                        <\/td>\n                        <td class=\"pcvm-specs__comparison-issues\">\n                            <div class=\"flex\">\n                                <span>\n                                    <strong>[Thermal Effects]<\/strong>High temperatures may cause thermal deformation or internal stresses in the material.<\/span>\n                                <span>\n                                    <strong>[Surface Quality Limitations]<\/strong>Microcracks or re-solidification layers may occur.<\/span>\n                            <\/div>\n                        <\/td>\n                        <td class=\"pcvm-specs__comparison-advantages\">\n                            <div class=\"flex\">\n                                <span>\n                                    <strong>[Low Thermal Impact]<\/strong>Plasma surface modification is performed at low temperatures, minimizing material degradation due to heat.<\/span>\n                                <span>\n                                    <strong>[High-Quality Surface]<\/strong>Damage-free polishing significantly improves surface quality.<\/span>\n                            <\/div>\n                        <\/td>\n                    <\/tr>\n                <\/tbody>\n            <\/table>\n        <\/div>\n    <\/section>\n    <!-- Product Features Section -->\n    <section class=\"c-section pcvm-environment\">\n        <h2 class=\"pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">Product Features<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <div class=\"pcvm-product-features__grid col1\">\n            <div class=\"pcvm-product-features__item\">\n                <h3 class=\"c-title l3\">PAP (Plasma Assisted Polishing) offers a significant advantage over competing polishing methods by enabling highly efficient, damage-free polishing of hard materials. This provides the following benefits:<\/h3>\n                <ul class=\"pcvm-product-features__list\">\n                    <li>Improved Product Quality: High-quality surface finishing enhances the product&#8217;s performance and reliability.<\/li>\n                    <li>Improved Productivity: Faster polishing speeds improve production efficiency.<\/li>\n                    <li>Cost Reduction: Shorter polishing time and reduced environmental impact lead to overall cost savings.<\/li>\n                    <li>Environmental Compliance: No chemicals are used, ensuring compliance with environmental regulations and enhancing the company&#8217;s image.<\/li>\n                <\/ul>\n            <\/div>\n        <\/div>\n    <\/section>\n    <!-- Equipment Installation Steps Section -->\n    <section class=\"c-section pcvm-steps\">\n        <h2 class=\"pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">Steps to Implementing PAP<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <div class=\"pcvm-steps__grid\">\n            <div class=\"pcvm-steps__item\">\n                <p class=\"pcvm-steps__label\">STEP<\/p>\n                <div class=\"pcvm-steps__icon\">\n                    <img src=\"\/assets\/img\/pap\/ico-plasma-cvm1.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-steps__title\">Inquiry<\/h3>\n                <p class=\"pcvm-steps__text\">Consult with us on technology and systems. <\/p>\n            <\/div>\n            <div class=\"pcvm-steps__item\">\n                <p class=\"pcvm-steps__label\">STEP<\/p>\n                <div class=\"pcvm-steps__icon\">\n                    <img src=\"\/assets\/img\/pap\/ico-plasma-cvm2.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-steps__title\">Technology Introduction<\/h3>\n                <p class=\"pcvm-steps__text\"> Visit or Web meeting based on your preference. <\/p>\n            <\/div>\n            <div class=\"pcvm-steps__item\">\n                <p class=\"pcvm-steps__label\">STEP<\/p>\n                <div class=\"pcvm-steps__icon\">\n                    <img src=\"\/assets\/img\/pap\/ico-plasma-cvm3.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-steps__title\">Sample Polishing and Evaluation<\/h3>\n                <p class=\"pcvm-steps__text\"> Test polishing and evaluation cycles are conducted as needed. <\/p>\n            <\/div>\n            <div class=\"pcvm-steps__item\">\n                <p class=\"pcvm-steps__label\">STEP<\/p>\n                <div class=\"pcvm-steps__icon\">\n                    <img src=\"\/assets\/img\/pap\/ico-plasma-cvm10.webp\" alt=\"\">\n                <\/div>\n                <h3 class=\"pcvm-steps__title\">Proposal for Cost Estimate and System Specifications<\/h3>\n                <p class=\"pcvm-steps__text\"> Proposal based on needs and test polishing results. <\/p>\n            <\/div>\n        <\/div>\n    <\/section>\n    <!-- Optimal System Proposal Section -->\n    <section class=\"c-section pcvm-environment\">\n        <div class=\"needs-bg\">\n            <h2 class=\"pcvm-section-title\">\n                <span class=\"pcvm-section-title__text\">Proposing the optimal system tailored to your needs.<\/span>\n                <span class=\"pcvm-section-title__line\"><\/span>\n            <\/h2>\n            <p class=\"pcvm-environment__contact-text\"> If you have any inquiries or need more detailed information, please feel free to contact JTEC CORPORATION. <\/p>\n            <a href=\"\/english\/contact\/pap-contact\/\" class=\"pcvm-contact-button\">\n                <span>Contact Us<\/span>\n            <\/a>\n        <\/div>\n    <\/section>\n    <!-- Main Unit Configuration Example Section -->\n    <section class=\"c-section pcvm-composition\">\n        <h2 class=\"pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">Example of Main Unit Configuration<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <div class=\"c-image -white u-text-center\">\n            <img style=\"width: 800px\" src=\"\/assets\/img\/pap\/PAPsystem_en.webp\" alt=\"Example Configuration of PAP (Plasma Assisted Polishing) System\">\n        <\/div>\n    <\/section>\n    <!-- Equipment Specifications Section -->\n    <section class=\"c-section pcvm-specs\">\n        <h2 class=\"pcvm-section-title\">\n            <span class=\"pcvm-section-title__text\">PAP general specifications<\/span>\n            <span class=\"pcvm-section-title__line\"><\/span>\n        <\/h2>\n        <div class=\"pcvm-specs__table-wrapper\">\n            <table class=\"pcvm-specs__table\">\n                <thead>\n                    <tr>\n                        <th class=\"pcvm-specs__table-header-main\" colspan=\"2\">PAP(Plasma Assisted Polishing Method)<\/th>\n                        <th class=\"pcvm-specs__table-header-sub\">PA1300<\/th>\n                    <\/tr>\n                <\/thead>\n                <tbody>\n                    <tr>\n                        <td class=\"pcvm-specs__table-label\" rowspan=\"5\">Basic Specifications<\/td>\n                        <td class=\"pcvm-specs__table-cell\">Grinding plate<\/td>\n                        <td class=\"pcvm-specs__table-cell\">Quartz plate \/ Si-plate (approx. 8 inch)<\/td>\n                    <\/tr>\n                    <tr>\n                        <td class=\"pcvm-specs__table-cell\">Workpiece Size<\/td>\n                        <td class=\"pcvm-specs__table-cell\">Flat: Maximum diameter 4 inches, Thickness: 0.4 mm \u2013 20 mm<\/td>\n                    <\/tr>\n                    <tr>\n                        <td class=\"pcvm-specs__table-cell\">Plasma Power Supply<\/td>\n                        <td class=\"pcvm-specs__table-cell\">Maximum 1 kW<\/td>\n                    <\/tr>\n                    <tr>\n                        <td class=\"pcvm-specs__table-cell\">Process Gas<\/td>\n                        <td class=\"pcvm-specs__table-cell\">Ar\u3001 O<sub>2<\/sub><\/td>\n                    <\/tr>\n                    <tr>\n                        <td class=\"pcvm-specs__table-cell\">Vacuum Level (During Processing)<\/td>\n                        <td class=\"pcvm-specs__table-cell\">Ultimate vacuum: 20 Pa<\/td>\n                    <\/tr>\n                <\/tbody>\n            <\/table>\n        <\/div>\n        <p class=\"pcvm-specs__note\">\u203bFor workpiece size, please consult us.<\/p>\n    <\/section>\n  <\/div>\n\n\n\n<div class=\"c-fix-button\">\n    <button class=\"c-fix-button__close\" aria-label=\"Close\">\n      \n        <img loading=\"lazy\" src=\"\/assets\/img\/icon-close01.svg\" alt=\"\" width=\"24\" height=\"24\">\n      \n    <\/button>\n    <div class=\"c-fix-button__inner\">\n      <p class=\"c-fix-button__text\">\n        For inquiries about PAP, please contact us here\n      <\/p>\n      <div class=\"c-fix-button__buttons\">\n        <a href=\"\/english\/contact\/pap-contact\/\" class=\"c-fix-button__btn -contact\">\n          <span>Contact Us<\/span>\n          \n            \n          \n        <\/a>\n      \n      <\/div>\n    <\/div>\n  <\/div>\n","protected":false},"excerpt":{"rendered":"<p>PAP Plasma Assisted Polishing Using plasma to activate the workpiece and seal surfaces, it enables clean, effi [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":4710,"menu_order":30,"comment_status":"closed","ping_status":"closed","template":"page-device-lp.php","meta":[],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages\/4783"}],"collection":[{"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/comments?post=4783"}],"version-history":[{"count":12,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages\/4783\/revisions"}],"predecessor-version":[{"id":7923,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages\/4783\/revisions\/7923"}],"up":[{"embeddable":true,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages\/4710"}],"wp:attachment":[{"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/media?parent=4783"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}