{"id":4894,"date":"2025-10-20T15:48:17","date_gmt":"2025-10-20T06:48:17","guid":{"rendered":"https:\/\/jteccorp.wdkb.jp\/?page_id=4894"},"modified":"2026-05-19T10:31:51","modified_gmt":"2026-05-19T01:31:51","slug":"nano-measurement-technology","status":"publish","type":"page","link":"https:\/\/www.j-tec.co.jp\/english\/optical\/nano-measurement-technology\/","title":{"rendered":"Nano Measurement Technology"},"content":{"rendered":"\n<h1 class=\"c-title content-head -bd\">Nano Measurement Technology<\/h1>\n<section class=\"c-section\">\n    <div class=\"c-text\">\n        <p class=\"u-fw-bold u-fs20\"> To produce high-precision X-ray mirrors with nano-order shape errors (shape difference of several atoms), ultra-high-precision measurement technology is required that enables high measurement accuracy and reproducibility. The JTEC CORPORATION manufactures high-precision mirrors using MSI, RADSI, and CMM measurement technologies. These have been highly rated by the world\u2019s major synchrotron radiation facilities. <\/p>\n    <\/div>\n<\/section>\n<section class=\"c-section\" id=\"msi-radsi\">\n    <h2 class=\"c-title l2\">MSI &amp; RADSI<\/h2>\n    <div class=\"c-text\">\n        <p> MSI and RADSI, which are nano-measurement technologies of JTEC CORPORATION, are surface shape nano-measurement methods researched and developed by Professor Kazuhito Yamauchi of The University of Osaka and are indispensable technologies for the production of high-precision X-ray mirrors. <\/p>\n        <h3 class=\"c-title l3\" style=\"margin-top: 1.2em;margin-bottom: 0.4em\"> MSI(Microstitching Interferometry)<\/h3>\n        <p> MSI is a technology that evaluates surface roughness by measuring a minute area with a Michelson-type phase-shift interferometer. It measures the nano shape of the entire mirror by a stitching mechanism. In X-ray mirrors, nano-level surface roughness (high-frequency components) significantly affects reflectance. However, due to errors caused by the stage mechanism, MSI has a limit to its measurement accuracy of large waviness (low frequency component) of the entire mirror. <\/p>\n        <h3 class=\"c-title l3\" style=\"margin-top: 1.2em;margin-bottom: 0.4em\"> RADSI(Relative Angle Determinable Stitching Interferometry)<\/h3>\n        <p> RADSI is a technology that offers a unique stitching mechanism for Fizeau interferometry, and measures the overall shape data by gradually tilting the measurement surface and connecting the acquired measurement data. In X-ray mirrors, the large waviness of the entire mirror significantly affects the light collection size. RADSI enables nano-order shape measurement even for aspherical shapes that have been difficult to measure thus far. <\/p>\n        <p> JTEC CORPORATION combines MSI and RADSI measurement data (MSI high-frequency component and RADSI low-frequency component) to minimize the measurement error of all spatial wavelengths in the shape measurement of the entire X-ray mirror at nano scale. This is the advanced realization of shape measurement. <\/p>\n        <p> In collaboration with The University of Osaka, we have developed in-house automated system using MSI and RADSI to improve the mirror production efficiency. We have obtained numerous patents for this technology in collaboration with The University of Osaka. <\/p>\n        <p> In addition, we have independently developed measurement technology for long mirrors, for which demand is growing. To date, we have achieved nanometer-order shape measurement for aspherical mirrors up to 1 m long. <\/p>\n    <\/div>\n    <div class=\"c-image  u-mt40 u-text-center\">\n        <img src=\"\/assets\/img\/optical\/nano-measurement-technology\/img_nano-measure1-en.webp\" alt=\"MSI &amp; RADSI\">\n    <\/div>\n    <div class=\"c-image  u-mt40 u-text-center\">\n        <img src=\"\/assets\/img\/optical\/nano-measurement-technology\/img_nano-measure2_en.webp\" alt=\"MSI &amp; RADSI\">\n    <\/div>\n<\/section>\n<section class=\"c-section\" id=\"cmm\">\n    <h2 class=\"c-title l2\">CMM (Coordinate Measuring Machine): Nano 3D Shape Measurement Technology<\/h2>\n    <div class=\"c-text\">\n        <p> CMM is a nano 3D shape measurement technology that uses a laser probe to measure height data with ultra-high accuracy (sub-nanometer). JTEC CORPORATION&#8217;s CMM technology enables nano-order shape measurement even for steep mirrors with a short radius of curvature (such as spheroid mirrors) that were not possible with conventional measurement methods using interferometers. <\/p>\n    <\/div>\n<\/section>\n","protected":false},"excerpt":{"rendered":"<p>Nano Measurement Technology To produce high-precision X-ray mirrors with nano-order shape errors (shape differ [&hellip;]<\/p>\n","protected":false},"author":1,"featured_media":0,"parent":4833,"menu_order":14,"comment_status":"closed","ping_status":"closed","template":"page-optical-detail.php","meta":[],"acf":[],"aioseo_notices":[],"_links":{"self":[{"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages\/4894"}],"collection":[{"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages"}],"about":[{"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/types\/page"}],"author":[{"embeddable":true,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/users\/1"}],"replies":[{"embeddable":true,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/comments?post=4894"}],"version-history":[{"count":3,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages\/4894\/revisions"}],"predecessor-version":[{"id":7876,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages\/4894\/revisions\/7876"}],"up":[{"embeddable":true,"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/pages\/4833"}],"wp:attachment":[{"href":"https:\/\/www.j-tec.co.jp\/english\/wp-json\/wp\/v2\/media?parent=4894"}],"curies":[{"name":"wp","href":"https:\/\/api.w.org\/{rel}","templated":true}]}}