{"id":4894,"date":"2025-10-20T15:48:17","date_gmt":"2025-10-20T06:48:17","guid":{"rendered":"https:\/\/jteccorp.wdkb.jp\/?page_id=4894"},"modified":"2026-07-01T12:06:30","modified_gmt":"2026-07-01T03:06:30","slug":"nano-measurement-technology","status":"publish","type":"page","link":"https:\/\/www.j-tec.co.jp\/english\/optical\/nano-measurement-technology\/","title":{"rendered":"Nano Measurement Technology"},"content":{"rendered":"\n

Nano Shape Measurement Technologies for High-Precision X-Ray Mirrors (MSI\/RADSI\u30fbCMM\u30fbCGHI)<\/h1>\n
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To manufacture high-precision X-ray mirrors with nano-order shape errors\u2014equivalent to a variance of just a few atoms\u2014ultra-high-precision measurement delivering exceptional accuracy and reproducibility is indispensable. As a beamline optics supplier dedicated to precision mirror fabrication, JTEC manufactures high-precision synchrotron mirrors utilizing advanced MSI, RADSI, CMM, and CGHI measurement technologies. These optics have earned high acclaim from major synchrotron radiation facilities worldwide.\n\t\t<\/p>\n <\/div>\n<\/section>\n

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MSI & RADSI<\/h2>\n
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MSI and RADSI, which are nano-measurement technologies of JTEC CORPORATION, are surface shape nano-measurement methods researched and developed by Professor Kazuhito Yamauchi of The University of Osaka and are indispensable technologies for the production of high-precision X-ray mirrors. <\/p>\n

MSI(Microstitching Interferometry)<\/h3>\n

MSI is a technology that evaluates surface roughness by measuring a minute area with a Michelson-type phase-shift interferometer. It measures the nano shape of the entire mirror by a stitching mechanism. In X-ray mirrors, nano-level surface roughness (high-frequency components) significantly affects reflectance. However, due to errors caused by the stage mechanism, MSI has a limit to its measurement accuracy of large waviness (low frequency component) of the entire mirror. <\/p>\n

RADSI(Relative Angle Determinable Stitching Interferometry)<\/h3>\n

RADSI is a technology that offers a unique stitching mechanism for Fizeau interferometry, and measures the overall shape data by gradually tilting the measurement surface and connecting the acquired measurement data. In X-ray mirrors, the large waviness of the entire mirror significantly affects the light collection size. RADSI enables nano-order shape measurement even for aspherical shapes that have been difficult to measure thus far. <\/p>\n

JTEC CORPORATION combines MSI and RADSI measurement data (MSI high-frequency component and RADSI low-frequency component) to minimize the measurement error of all spatial wavelengths in the shape measurement of the entire X-ray mirror at nano scale. This is the advanced realization of shape measurement. <\/p>\n

In collaboration with The University of Osaka, we have developed in-house automated system using MSI and RADSI to improve the mirror production efficiency. We have obtained numerous patents for this technology in collaboration with The University of Osaka. <\/p>\n

In addition, we have independently developed measurement technology for long mirrors, for which demand is growing. To date, we have achieved nanometer-order shape measurement for aspherical mirrors up to 1 m long. <\/p>\n <\/div>\n