2020年6月8日（月）～12日（金）に開催されました「The European Society for Precision Engineering and Nanotechnology (EUSPEN) 第20回バーチャル国際会議」に参加し、大阪大学との共同研究であるSi鏡面のCARE加工技術（CAtalyst-Referred Etching）の研究成果を発表致しました。

Siミラーの粗さ仕上げ加工としてCARE加工技術の実用化を進め、ミラー面全体の粗さを原子誤差レベルの滑らかさ0.06 nm未満を達成しました。

EUSPEN 20th Virtual International Conference: Research Results Announcement

We participated in “The European Society for Precision Engineering and Nanotechnology (EUSPEN) The 20th Virtual International Conference”, which was held from June 8th (Monday) to 12th (Friday), 2020.  The research results of CARE processing technology (Catalyst-Referred Etching) for Si mirror surface in collaboration with Osaka University were announced.

We have realized the practical application of CARE to Si mirrors as the final processing method. The CARE-processed surface is atomically smooth and has a roughness of less than 0.06 nm over the whole mirror surface.