Advanced Kirkpatrick-Baez (KB) Mirrors (1D Wolter Mirrors)

In advanced X-ray microscopes, Wolter mirrors are utilized as the imaging optical system. A Wolter mirror is a dual-reflection mirror combining a rotationally elliptical surface with a rotationally hyperbolic surface, excelling at imaging over a wide field of view. Our Advanced KB mirror incorporates two Wolter mirrors to focus X-rays in the horizontal and vertical directions, respectively, functioning as a state-of-the-art X-ray focusing mirror system.In imaging tests, JTEC’s Advanced KB mirror (PV 2 nm) achieved a resolution high enough to resolve a 50 nm minimum line width. This represents the world’s highest resolution for an achromatic X-ray microscope. Because it maintains focal spot size even with slight deviations in the incident angle, the Advanced KB mirror provides a stable focal area that is highly robust against temperature drift and vibration.