JTEC’s high-precision X-ray mirrors are manufactured using EEM (Elastic Emission Machining) fabrication technology to achieve a shape accuracy within the nanometer order relative to the design shape. Compared to conventional focusing mirrors, our mirrors offer superior focusing performance, earning a high reputation for achieving diffraction-limited focusing. Due to the total reflection mirror system, they exhibit no chromatic aberration and deliver higher efficiency compared to other optical elements such as zone plates or lenses. Furthermore, the flexibility in working distance settings allows us to design custom optical systems tailored to each user’s specific experimental equipment.
Peak-to-Valley (PV)—the height difference between the highest and lowest points—is used as an index to indicate the accuracy of the mirror shape. We can manufacture mirrors up to 1 meter in length with an accuracy of PV 2 nm or less. In addition to flat mirrors, we can fabricate a wide variety of freeform surfaces, including elliptical, cylindrical, spherical, parabolic, and ellipsoidal shapes. This capability enables our mirrors to reflect the uniform, intense X-rays characteristic of large synchrotron radiation facilities while perfectly maintaining their wavefront.
| Length | ≤ 1000 mm |
| Surface shape | 1-dimension mirror : plane, cylinder, sphere, ellipse, parabola, hyperbola etc. Rotating shape (2-dimension shape) : Ellipsoidal, spheroidal, paraboloidal etc. |
| Material | Silicon, Quartz, Low expansion glass etc. |
| Slope error | < 0.05 urad RMS |
| Shape error | < 1.0 nm (PV) (or <0.3 nm RMS) |
| Surface roughness | < 0.1 nm RMS (evaluation area 100 μm × 100 μm) |
| Coating | Pt, Au, Rh, Pd, Ag, Ni, C, B4C, Cr, etc. |