To produce high-precision X-ray mirrors with nano-order shape errors (shape difference of several atoms), ultra-high-precision measurement technology is required that enables high measurement accuracy and reproducibility. The JTEC Corporation manufactures high-precision mirrors using MSI, RADSI, and CMM measurement technologies. These have been highly rated by the world’s major synchrotron radiation facilities.
Micro Stitching Interferometry (MSI) and Relative Angle Determinable Stitching Interferometry (RADSI)
MSI and RADSI, which are nano-measurement technologies of JTEC Corporation, are surface shape nano-measurement methods researched and developed by Professor Kazuhito Yamauchi of Osaka University and are indispensable technologies for the production of high-precision X-ray mirrors.
MSI is a technology that evaluates surface roughness by measuring a minute area with a Michelson-type phase-shift interferometer. It measures the nano shape of the entire mirror by a stitching mechanism. In X-ray mirrors, nano-level surface roughness (high-frequency components) significantly affects reflectance. However, due to errors caused by the stage mechanism, MSI has a limit to its measurement accuracy of large waviness (low frequency component) of the entire mirror.
RADSI is a technology that offers a unique stitching mechanism for Fizeau interferometry, and measures the overall shape data by gradually tilting the measurement surface and connecting the acquired measurement data. In X-ray mirrors, the large waviness of the entire mirror significantly affects the light collection size. RADSI enables nano-order shape measurement even for aspherical shapes that have been difficult to measure thus far.
JTEC Corporation combines MSI and RADI measurement data (MSI high-frequency component and RADSI low-frequency component) to minimize the measurement error of all spatial wavelengths in the shape measurement of the entire X-ray mirror at nano scale. This is the advanced realization of shape measurement.
In collaboration with Osaka University, we have developed in-house automated equipment using MSI and RADSI to improve the mirror production efficiency. We have obtained numerous patents for this technology in collaboration with Osaka University.
In addition, we have independently developed measurement technology for long mirrors, for which demand is growing. To date, we have achieved nanometer-order shape measurement for aspherical mirrors up to 1 m long.
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Coordinate Measuring Machine (CMM): Nano 3D shape measurement technology
CMM is a nano 3D shape measurement technology that uses a laser probe to measure height data with ultra-high accuracy (sub-nanometer). JTEC Corporation's CMM technology enables nano-order shape measurement even for steep mirrors with a short radius of curvature (such as spheroid mirrors) that were not possible with conventional measurement methods using interferometers.Return to top of page